Kinik® Diagrid Pad Conditioners

Ideal for Improving Pad Life and Process Consistency

DiaGrid® pad conditioners incorporate many of the best features available in pad conditioning technology, making them ideal for the demands of today’s complex CMP processes. The product consists of a stainless steel base, overlaid with brazed diamonds arranged in a grid pattern that provides superior control of diamond spacing, height and size. A robust, chemically enhanced braze holds the diamonds firmly in place with a chemical bond that is extremely resistant to diamond loss. The entire surface is covered with the DiaShield® PVD diamond overcoat which offers superior chemical resistance, ideal for use in tungsten and copper processes. Key Features Superior diamond placement control Superior uniformity of diamond height Robust brazed matrix DiaShield PVD diamond overcoat Stringent QC inspection on every pad conditioner Factory high pressure pre-conditioning procedure BENEFITS Enhanced process stability Increased conditioner lifetime Increased polishing pad lifetime Lower Cost of Ownership Reduced risk of defectivity due to diamond pull-out Increased wafer yield Enhanced resistance to acidic slurries Compatible with Tungsten (W) and Copper (Cu) slurry chemistry Direct replacement for most applications

Kinik® Diagrid Pad Conditioners Details

Base Material:

Diamond

Shelf Life:

No Expiration

Packaging:

Diagrid pad conditioners are packaged in plastic trays and vaccum sealed in cleanroom-grade plastic.

Complementary Products

Category - Conditioners

Handling Instructions

Diagrid pad conditioners require no special handling.

Storage

Diagrid pad conditioners require no specialized storage.

Disposal

Dispose of in accordance with all applicable local regulations.

Contact Information

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