Vector HTS-3

Lapping/Polishing Additive for Semiconductor Materials

VECTOR HTS-3 is a highly biodegradable, viscous, clear polymer/surfactant mixture, formulated to be used with Aluminum Oxide (either PWA type or FO Type) and de-ionized water to form a medium viscosity lapping slurry. Designed primarily for use in lapping silicon wafers, VECTOR HTS-3 fully disperses and suspends abrasive material for long periods of time (>1 week) with no change in physical or chemical characteristics. Designed for use on all types of lapping plates, the product performs particularly well with serrated or grooved plates. Through the use of newer technology, VECTOR HTS-3 produces a less viscous lapping slurry (then older type products) yet has superior suspension qualities. The resultant lower viscosity slurry is easier to flow through feed lines and onto large lapping plates. Benefits: • Produces flatter wafers • Reduces wafer damage • Increases cut rate • Helps to eliminate scratching • Facilitates post-lapping cleaning • Provides more consistent results • Helps prevent wafer staining • Reduces abrasive use

Vector HTS-3 Details

Base Material:

Water

Shelf Life:

24 Months

Packaging:

Product is available in 5-gallon pails and 55-gallon drums.

Applications:

Gallium Arsenide, Germanium, Sapphire, Silicon, Silicon Carbide

Similar Products

Vector HTS-1.3EU Vector HTS-1.4EU Vector HTN
Base Material Water Water Water
pH 9.0 9.0 9.9
Specific Gravity 1.00 1.00 1.01
Color Translucent White Translucent White Blue
Category - Lapping Additives

Handling Instructions

VECTOR HTS-3 should be mixed with deionized water and abrasive using the following slurry formula: 77-82% water, 15-18% abrasive, 3-5% VECTOR HTS-3. Use an agitator with a marine type propeller and a motor capable of 1750 RPM. Use a low shear dispense pump for feeding the mixed slurry onto the lap.

Disperse the abrasive with DI water between 500 and 1500 rpm for 10 minutes. Add HTS-3. Mix for approximately 5-10 minutes. A small vortex should form at the surface of the slurry. Turn the mixer off, or to a maximum of 50 rpm.

Storage

Product should be stored in a temperature controlled environment. Prolonged exposure to temperatures at or below 32° Fahrenheit (0°C) is discouraged. Prolonged exposure to temperatures at or above 100° Fahrenheit (38°C) is also discouraged. In addition, material should always be sealed when not in use to prevent evaporation.

Disposal

Dispose of in accordance with all applicable local regulations.

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