Dow® Celexis™ CX94S

High-Purity Nano Cerium Slurry for STI

The Celexis Series of Shallow Trench Isolation (STI) slurries is a ceria-based high selectivity system which provides silica-like defectivity with excellent planarization expected of direct STI processes. Developed around mask layouts with a wide range of pattern densities, Celexis exhibits efficient and robust clearing behaviors needed to meet the tight tolerance requirements of 90nm and beyond design rules. Celexis features a new ceria particle produced with Nanophase Technologies' patented NanoArc™ Synthesis (NAS) process. The NAS process enables a new standard in reproducibility and control of the particle distribution and tail truncation—key attributes for achieving low defectivity and lot-to-lot consistency. Particle FeaturesThe NAS process from Nanophase employs a patented plasma technology that produces unique and very desirable properties in the base particle. These properties enable the following benefits: Highly controlled and repeatable particle size distribution High surface charge that enables stable dispersion properties Precisely controlled particle tail which enables low defectivity Discrete crystal morphology that eliminates the need for conventional milling—thereby eliminating potential contamination sources

Dow® Celexis™ CX94S Details

Base Material:

Cerium Oxide

Shelf Life:

12 Months

Packaging:

Standard packaging comes in two sizes: 5 gallon, and 55 gallon. Standard totes also come in two sizes: 264 gallon and 330 gallon. These totes are rigid, virgin, HDPE vessels in an aluminum cage overpack. The openings are six-inch buttress with a two-inch NPT bung with a bottom drain. They can accept dip tubes or other commercially available dispense systems.

Complementary Products

Category - Polishing Slurries

Handling Instructions

Storage tanks and distribution piping should be constructed of engineering plastic, such as polyethylene, polypropylene, or PTFE. Materials such as aluminum, copper, brass, and PVC should be avoided. Avoid leaving slurry containers open for extended periods of time. Leaving containers open may result in drying which can cause wafer scratching. Consult your Eminess representative for recommendations when designing handling systems and optimum point of use filtration schemes.

Storage

Storage outside of the recommended conditions may result in irreversible product degradation. Products can be stored up to the expiration date between the temperatures range of 0°C - 45°C (32°F - 113°F). Avoid prolonged exposure at temperatures at either extreme. In the event of exposure outside of the recommended conditions, please contact your Eminess technical representative for recommendations. In all cases the products should be allowed to return to a room temperature prior to use. All shipments include temperature indicators to monitor shipping conditions.

Disposal

Dispose of in accordance with all applicable local regulations.

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