Products / Polishing Slurries / Colloidal Silica / Dow® Klebosol™ 1630/16
Dow® Klebosol™ 1630/16
Industry Standard Colloidal Silica Slurries for CMP
Dow® Klebosol™ 1630/16 Details
Base Material:
Colloidal Silica
Shelf Life:
18 Months
Packaging:
Standard packaging comes in two sizes: 5 gallon, and 55 gallon. Standard totes also come in two sizes: 264 gallon and 330 gallon. These totes are rigid, virgin, HDPE vessels in an aluminum cage overpack. The openings are six-inch buttress with a two-inch NPT bung with a bottom drain. They can accept dip tubes or other commercially available dispense systems.
Similar Products
Dow® Klebosol™ 30N50 | Dow® Klebosol™ 30N50PHN | Dow® Klebosol™ 40PA50 | Dow® Klebosol™ 1630/16 | Dow® Klebosol™ 1630/26 | |
Base Material | Colloidal Silica | Colloidal Silica | Colloidal Silica | Colloidal Silica | Colloidal Silica |
Particle Size (µm) | 0.050 | 0.050 | 0.050 | 0.120 | 0.120 |
pH | 10.0 | 10.9 | 10.7 | 10.7 | |
Solids Content | 30.0% | 30.0% | 16.0% | 26.0% | |
Specific Gravity | 1.21 | 1.21 | 1.30 | 1.21 | 1.21 |
Complementary Products
-
Dow® IC1000™ Polishing Pads
The Industry Standard for Chemical Mechanical Planarization
-
NTA DF200
Template Assembly with DF200 Film
-
Politex™ Reg
Classic CMP Finishing Pad
-
Suba™ 500
Polyurethane Impregnated Polyster Felt Pad
Handling Instructions
Storage tanks and distribution piping should be constructed of engineering plastic, such as polyethylene, polypropylene, or PTFE. Materials such as aluminum, copper, brass, and PVC should be avoided. Avoid leaving slurry containers open for extended periods of time. Leaving containers open may result in drying which can cause wafer scratching. Consult your Eminess representative for recommendations when designing handling systems and optimum point of use filtration schemes.
Storage
Storage outside of the recommended conditions may result in irreversible product degradation. Products can be stored up to the expiration date between the temperatures range of 0°C - 45°C (32°F - 113°F). Avoid prolonged exposure at temperatures at either extreme. In the event of exposure outside of the recommended conditions, please contact your Eminess technical representative for recommendations. In all cases the products should be allowed to return to a room temperature prior to use. All shipments include temperature indicators to monitor shipping conditions.
Disposal
Dispose of in accordance with all applicable local regulations.