Dow® Klebosol™ 30H50

Industry Standard Colloidal Silica Slurries for CMP

Klebosol slurry products are the most widely used colloidal silica products for CMP polishing. These particles are grown and maintain excellent stability in their liquid medium. Klebosol slurries have been shown to meet or exceed industry expectations with competitive results. Key Features: Individual, non-settling spherical particles Wide range of particle sizes offered Non-agglomerating slurries with tight particle distributions Enables superior pad life and wafer surface quality Long shelf life Product development for customized applications Single component, ready to use Enables high removal rates Two global manufacturing facilities Slurries available as Klebosol II product line optimized to reduce and control large particle counts

Dow® Klebosol™ 30H50 Details

Base Material:

Colloidal Silica

Shelf Life:

12 Months

Packaging:

Standard packaging comes in two sizes: 5 gallon, and 55 gallon. Standard totes also come in two sizes: 264 gallon and 330 gallon. These totes are rigid, virgin, HDPE vessels in an aluminum cage overpack. The openings are six-inch buttress with a two-inch NPT bung with a bottom drain. They can accept dip tubes or other commercially available dispense systems.

Applications:

Tungsten

Similar Products

Dow® Klebosol™ 1501-50 Dow® Klebosol™ 1508-50 Dow® Klebosol™ 30N50 Dow® Klebosol™ 30N50PHN
Base Material Colloidal Silica Colloidal Silica Colloidal Silica Colloidal Silica
Particle Size (µm) 0.050 0.050 0.050 0.050
pH 10.9 10.9 10.0 10.9
Solids Content 30.0% 30.0% 30.0% 30.0%
Specific Gravity 1.21 1.21 1.21 1.21

Complementary Products

Category - Polishing Slurries

Handling Instructions

Storage tanks and distribution piping should be constructed of engineering plastic, such as polyethylene, polypropylene, or PTFE. Materials such as aluminum, copper, brass, and PVC should be avoided. Avoid leaving slurry containers open for extended periods of time. Leaving containers open may result in drying which can cause wafer scratching. Consult your Eminess representative for recommendations when designing handling systems and optimum point of use filtration schemes.

Storage

Storage outside of the recommended conditions may result in irreversible product degradation. Products can be stored up to the expiration date between the temperatures range of 0°C - 45°C (32°F - 113°F). Avoid prolonged exposure at temperatures at either extreme. In the event of exposure outside of the recommended conditions, please contact your Eminess technical representative for recommendations. In all cases the products should be allowed to return to a room temperature prior to use. All shipments include temperature indicators to monitor shipping conditions.

Disposal

Dispose of in accordance with all applicable local regulations.

Contact Information

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