Units of Measure
Common Units of Measure in the Polishing Industry
| Unit | System | Dimension | Common Uses |
|---|---|---|---|
| Angstrom (Å) | Metric | 0.0000000001m 0.1 nm 10x-10 10x-4µm |
Surface Roughness Removal Rates |
| Nanometer (nm) | Metric | 0.000000001m 10x-9 10x-3µm |
Removal Rates Slurry Particle Size |
| Micrometer Micron (µ) | Metric | 0.000001 m 0.1 nm 10x-6m |
Removal Rates Slurry Particle Size Wafer Flatness TTV |
| Mil Thousandth | Standard | 0.001” | Pad Thickness Wafer Thickness Pocket Depths on Templates |