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DF200 Carrier Film
Protective Film with Laser-cut Vaccuum Holes
Carrier films are commonly used to protect wafers held in place by vacuum chuck heads in specially designed CMP tools. The soft, DF200 film protects the backside of the wafer from damage, while precision laser-cut...
| Base Material | Compressibility |
| Poromeric | 10.6 % |
FR4 Disk
Machined Fiberglass Disk
Eminess' FR4 disks are precision sheets of fiberglass, cut to meet specific customer requirements. They can be useful in providing a protective surface over platens when not in use, or as a base material for...
| Base Material |
| Fiberglass |
NTA CHOIS
Template Assembly with CHOIS Materials
Easy to use alternative to wax mounting technique, with simple installation and clean up. Ideal for customers who polish a variety of different sizes or unusually shaped substrates. CHOIS templates are manufactured to Eminess's...
Applications: Ceramic, Glass, Silicon
| Base Material | Backing Film Compressibility | Pocket Depth Range |
| Fiberglass | 9.01 % | 0.004 - 0.051 |
NTA DF200
Template Assembly with DF200 Film
Easy to use alternative to wax mounting technique, with simple installation and clean up. Ideal for customers who polish a variety of different sizes or unusually shaped substrates. DF200 is the premier backing film,...
Applications: Gallium Antimonide, Gallium Arsenide, Gallium Nitride, Germanium, Glass, Indium Phosphide, Lithium Niobate, Lithium Tantalate, Mercury Cadmium Telluride, Sapphire, Silicon, Silicon Carbide, Tungsten
| Base Material | Backing Film Compressibility | Pocket Depth Range |
| Fiberglass | 10.6 % | 0.004 - 0.052 |
NTA E310
Template Assembly with E310 Film
Easy to use alternative to wax mounting technique, with simple installation and clean up. Ideal for customers who polish a variety of different sizes or unusually shapped substrates. E310 backing film is durable in...
Applications: Silicon Carbide
| Base Material | Backing Film Compressibility | Pocket Depth Range |
| Fiberglass | 5.75 % | 0.004 - 0.055 |
NTA WB20
Template Assembly with WB20 Film
Easy to use alternative to wax mounting technique, with simple installation and clean up. Ideal for customers who polish a variety of different sizes or unusually shaped substrates. WB20 film has an unbuffed smooth...
Applications: Aluminum Nitride, Glass
| Base Material | Backing Film Compressibility | Pocket Depth Range |
| Fiberglass | 3.45 % | 0.004 - 0.056 |
WB20 Carrier Film
Protective Film with Laser-cut Vaccuum Holes
Carrier films are commonly used to protect wafers held in place by vaccuum chuck heads in specially designed CMP tools. The firm, closed-poreWB20 film protects the backside of the wafer from damage, while precision laser-cut...
| Base Material | Compressibility |
| Poromeric | 3.45 % |