Category - Polishing Fixtures

DF200 Carrier Film

Protective Film with Laser-cut Vaccuum Holes

Carrier films are commonly used to protect wafers held in place by vacuum chuck heads in specially designed CMP tools. The soft, DF200 film protects the backside of the wafer from damage, while precision laser-cut...

Base MaterialCompressibility
Poromeric10.6 %
Category - Polishing Fixtures

FR4 Disk

Machined Fiberglass Disk

Eminess' FR4 disks are precision sheets of fiberglass, cut to meet specific customer requirements. They can be useful in providing a protective surface over platens when not in use, or as a base material for...

Base Material
Fiberglass
Category - Polishing Fixtures

NTA CHOIS

Template Assembly with CHOIS Materials

Easy to use alternative to wax mounting technique, with simple installation and clean up.  Ideal for customers who polish a variety of different sizes or unusually shaped substrates.  CHOIS templates are manufactured to Eminess's...

Applications: Ceramic, Glass, Silicon

Base MaterialBacking Film CompressibilityPocket Depth Range
Fiberglass9.01 %0.004 - 0.051
Category - Polishing Fixtures

NTA DF200

Template Assembly with DF200 Film

Easy to use alternative to wax mounting technique, with simple installation and clean up.  Ideal for customers who polish a variety of different sizes or unusually shaped substrates.  DF200 is the premier backing film,...

Applications: Gallium Antimonide, Gallium Arsenide, Gallium Nitride, Germanium, Glass, Indium Phosphide, Lithium Niobate, Lithium Tantalate, Mercury Cadmium Telluride, Sapphire, Silicon, Silicon Carbide, Tungsten

Base MaterialBacking Film CompressibilityPocket Depth Range
Fiberglass10.6 %0.004 - 0.052
Category - Polishing Fixtures

NTA E310

Template Assembly with E310 Film

Easy to use alternative to wax mounting technique, with simple installation and clean up.  Ideal for customers who polish a variety of different sizes or unusually shapped substrates.  E310 backing film is durable in...

Applications: Silicon Carbide

Base MaterialBacking Film CompressibilityPocket Depth Range
Fiberglass5.75 %0.004 - 0.055
Category - Polishing Fixtures

NTA WB20

Template Assembly with WB20 Film

Easy to use alternative to wax mounting technique, with simple installation and clean up.  Ideal for customers who polish a variety of different sizes or unusually shaped substrates.  WB20 film has an unbuffed smooth...

Applications: Aluminum Nitride, Glass

Base MaterialBacking Film CompressibilityPocket Depth Range
Fiberglass3.45 %0.004 - 0.056
Category - Polishing Fixtures

WB20 Carrier Film

Protective Film with Laser-cut Vaccuum Holes

Carrier films are commonly used to protect wafers held in place by vaccuum chuck heads in specially designed CMP tools. The firm, closed-poreWB20 film protects the backside of the wafer from damage, while precision laser-cut...

Base MaterialCompressibility
Poromeric3.45 %